Babban fasali na 12in Olympus Wafer dubawa tsarin:
● Strong, abin dogara da kuma aminci watsa
12 inci Olympus wafer dubawa tsarin ci gaba da karfi, aminci da aminci na ƙarni na baya model, iya amintacce da amintacce jigilar 300 mm wafer, da kuma thin, Warped wafer ma za a iya jigilar amintacce.
● Human-injiniya zane, sauki aiki
12 inch Olympus wafer dubawa tsarin za a iya kyauta saita dubawa yanayin, a zane la'akari da aiki a baya injiniya, musamman mai da hankali ga na'urorin aiki sauƙi. Nau'ikan nau'ikan FOUP (Load Port) da FOSB.
12 inch Olympus wafer duba tsarin macro-lura da matsayi ingantaccen da kuma mai da hankali tsari na aiki raka'a, inganta aiki na na'urar.
Auto 300 mm wafer dubawa tsarin AL120-12 fasaha bayanai
samfurin |
AL120-LMB12-LP |
AL120-LMB12-F |
Wafer girma |
300 mm (SEMI M1.15 t = 775 μm) Zaɓi: 200 mm |
|
Yawan katisi |
Single akwati (Loading, cire da dacewa) |
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Cartridge saita tsawo |
900 mm |
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Loading tashar jiragen ruwa |
akwai |
Babu |
Handling tsari |
Surface macro, ciki macro, duba microscope |
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Bayani Mode |
All dubawa, samfurin dubawa |
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Wafer daidaitawa |
Non-contact tsakiyar zobe |
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Wafer handling hanyar |
Injin sanyi na inji |
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Aikace-aikacen microscope |
Semiconductor dubawa microscope MX61L |
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Aikace-aikace muhalli |
AC100~120 V,220~240 V,3.0/1.7 A,50/60 Hz , Injin -67 ~ -80 Kpa |
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Jirgin kaya |
XY hannu suction daukar tebur tare da XY roughness / daidaitawa da 360 digiri juyawa inji |
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Nauyi (ba tare da microscope) |
kimanin 360 kg |
kimanin 270 kg |
