AWL jerin wafer dubawa tsarin- Mai gabatar da

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AWL jerin wafer dubawa tsarin

AWL jerin wafer dubawa tsarin yana da duka kwanciyar hankali da tsaro, iya amintacce da amintacce watsa wafer, dace da wafer dubawa a gaba zuwa baya a

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AWL 系列晶圆检查系统

AWL 系列晶圆检查系统的显微镜

A halin yanzu, AWL jerin wafer mai sarrafawa yana da nau'ikan AWL046 da AWL068 biyu, za a iya amfani da su don gano wafer mai inci 4/6, gano wafer mai inci 6/8, da kewayon daidaitawa mai faɗi, tare da sassauƙa, za a iya saita yanayin bincike kyauta, cikakken daidaitawa da ƙirar injiniya, aiki mai dadi da sauƙi.

AWL jerinWafer duba tsarin amfanin

● 360 ° makro dubawa

AWL jerin wafer dubawa tsarin yana da macro dubawa hannu, zai iya cimma 360 ° juyawa na crystal macro dubawa, crystal baya macro dubawa 1, mafi sauki gano raunuka da ƙaura. Wafer karkata za a iya lura da shi ta hanyar ma'aunin. Crystal karkata kusurwa ≤70 °, Crystal baya 1 karkata kusurwa ≤90 °, Crystal baya 2 karkata kusurwa ≤160 °, amfani da juyawa aiki, karkata kusurwa, gaba daya za a iya gani duba dukan wafer m da kuma gefen.

● Injiniyar Injiniya

LCD nuni na wafer duba tsarin, zai iya samar da ma'aikata mafi m gani kwarewa, zai iya nuna a fili halin yanzu duba abubuwa da kuma tsari, debugging sigogi a duba daya.

Manual sauri sakin inji daukar tebur na wafer dubawa tsarin iya inganta operator ta'aziyya da aiki inganci.

Wafer lahani duba aikace-aikace lokuta

晶圆缺陷检查

AWL jerinWafer duba tsarin fasaha bayanai

samfurin		AWL046	AWL068
Wafer size (SEMI bayani)		150mm/125mm/100mm	200mm/150mm
Minimum kauri na wafer		150μm	180μm
nau'i		Bude akwatin (SEMI Stad.25(26)-ramun)
adadin akwati		1 Port
Bincika saitunan yanayin		cikakken dubawa / m dubawa / m dubawa / manual zabi
Wafer scan a cikin akwatin		●	●
Wafer presetting		●	●
Wafer Matsayi		Ba tare da tuntuɓar matsayi kwance-kwance / V-irin ramummuka, goyon bayan 0 °, 90 °, 180 °, 270 ° zuwa saituna
Bincika ayyuka	Micro dubawa	●	●
	Crystal macro dubawa	●	●
	Crystal baya macro dubawa 1	●	●
	Crystal baya macro dubawa 2	●	●
dacewa microscope		SOPTOPMicroscope na ƙarfeMX68R
Jirgin kaya		6 inch hudu layers inji motsi dandamali, low hannu X, Y shugabanci coaxial daidaitawa; Wafer bearing tebur, za a iya juyawa 360 °; Motsa tafiya 228mm (X shugabanci) × 170mm (Y shugabanci) Kulawa kewayon: 170mmX170mm ； Tare da clutch hannu, za a iya amfani da sauri motsi a cikin dukan tafiya kewayon;	8 inch hudu layers inji motsi dandamali, low hannu X, Y shugabanci coaxial daidaitawa; Wafer bearing tebur, za a iya juyawa 360 °, motsi tafiya 280mm (X shugabanci) × 210mm (Y shugabanci) kallo kewayon: 210mm×210mm ； Tare da clutch hannu, za a iya amfani da sauri motsi a dukan tafiya kewayon;
wutar lantarki		1P/220V/16A
injin tushen		—70KPA

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