- Bayani na samfurin
Tetrachlorosilane nazarin helium ion chromatographyAna amfani da gano trace gurɓataccen abu a cikin gas da aka yi amfani da lantarki masana'antu, karamin gano matattarar iya zuwa 5ppb. Kayan aiki ne sanye da high m helium ionization detector, amfani da Huai kamfanin ta tsakiyar yankan fasaha, samfurin bawul ne duk tare da bushe kariya iska hanya; An tsara dukan injin ta amfani da akwati mai yawa, kuma an sanye shi da tsarin daidaitawa na atomatik na matsin lamba don tabbatar da yawan samfurin samfurin daban-daban na ƙasa. Kayayyakin sun sami lambar yabo a matsayin A-matakin aikin canza nasarorin fasaha na birnin Shanghai.
| Silikon (SiHCl)3) Abubuwan da ke ciki (ƙididdigar ƙididdiga) / l0-6 ≤ | 400 | 25 | |
| Dichlorosilicane (SiH)2Cl2) Abubuwan da ke ciki (ƙididdigar ƙididdiga) / l0-6 ≤ | 400 | 25 | |
| Methyl dichlorosilicane (SiCl)2CH4) Abubuwan da ke ciki (ƙididdigar ƙididdiga) / l0-6 ≤ | 200 | 50 | |
| Karfe abubuwa da sauran abubuwa abun ciki | (Boron + Aluminum) (B + Al) abun ciki / (µg / kg) ≤ | —— | 0.1 |
| (phosphorus + arsenic) (P + As) abun ciki / (µg / kg) ≤ | —— | 0.3 | |
| gallium (Ga) abun ciki / (µg / kg) ≤ | —— | 0.5 | |
| Antimony (Sb) abun ciki / (µg / kg) ≤ | —— | 0.5 | |
| Indium (A) abun ciki / (µg / kg) ≤ | —— | 0.5 | |
| Calcium (Ca) abun ciki / (µg / kg) ≤ | 1 | 0.5 | |
| chromium (Cr) abun ciki / (µg / kg) ≤ | 1 | 0.5 | |
| Iron (Fe) abun ciki / (µg / kg) ≤ | 1 | 0.5 | |
| Potassium (K) abun ciki / (µg / kg) ≤ | 1 | 0.5 | |
| Sodium (Na) abun ciki / (µg / kg) ≤ | 1 | 0.5 | |
| Nickel (Ni) abun ciki / (µg / kg) ≤ | 1 | 0.5 | |
| Molybdenum (Mo) abun ciki / (µg / kg) ≤ | 1 | 0.5 | |
| manganese (Mn) abun ciki / (µg / kg) ≤ | 1 | 0.5 | |
| Jangila (Cu) abun ciki / (µg / kg) ≤ | 1 | 0.5 | |
| Cadmium (Cd) abun ciki / (µg / kg) ≤ | 1 | 0.5 | |
| Kobalt (Co) abun ciki / (µg / kg) ≤ | 1 | 0.5 | |
| Zinc (Zn) abun ciki / (µg / kg) ≤ | 1 | 0.5 | |
| Vanadium (V) abun ciki / (µg / kg) ≤ | 1 | 0.5 | |

