samfurin: JXA-8230
ma'aikata: JEOL
Kayan haɗi: Spectrometer (*3), Energy Spectrometer (*1)
Binciken abubuwa: B-U
ƙuduri: 3nm

Binciken lantarki kayan aiki ne wanda ke amfani da hasken X na halaye da aka samar bayan samfurin aikin hasken lantarki don nazarin abubuwan da ke ciki na microzone, wanda za a iya amfani dashi don nazarin tsarin sinadarai na microzones na ma'adinai a cikin ƙarancin ƙarancin ƙarancin ƙarancin ƙarancin ƙarancin ƙarancin Baya ga wasu abubuwa masu sauƙi kamar H, He, Li, Be, akwai abubuwa masu ƙarancin U da za a iya bincika su da yawa. Za a iya yin maki, line scan, fuska scan analysis.

Misali: Baturi foda EPMA fuska rarraba ma'auni sakamakon